| 摘要 |
<P>PROBLEM TO BE SOLVED: To highly efficiently change a conveyance direction of a substrate with reduced space, while conveying the substrates with tilted posture along conveyance paths intersected with each other. Ž<P>SOLUTION: The posture change device 22 includes: a support table 221; and an oscillation mechanism oscillating the table 221. The oscillation mechanism oscillates the support table 221 between a substrate receiving posture and a substrate delivering posture. In the substrate receiving posture, an upper surface of the table is tilted when seen from a specific direction, and the substrate S conveyed with tilted posture in the specific direction is received. In the substrate delivering posture, the upper surface of the table is tilted from a direction orthogonal to the specific direction, and the substrate S supported on the table is fed with the tilted posture in the specific direction. The substrate delivering posture is a posture in which the substrate S is rotated up to a position where a side S1 is in parallel with the orthogonal direction around an axis in parallel with a diagonal line passing through a top part on a lead and lower side of the substrate S, out of diagonal lines of a virtual square formed on the substrate S in which the side S1 on the lead side of the substrate S received with the substrate receiving posture is set to be a side. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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