发明名称 |
MEMS DEVICE AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
A MEMS device, including: a substrate having a first principal plane and a second principal plane opposite to the first principal plane; a through hole formed in the substrate; and a vibrating film formed over the first principal plane so as to cover the through hole. The first principal plane and the second principal plane are both a (110) crystal face; and the through hole has a substantially rhombic shape on the second principal plane.
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申请公布号 |
US2010059836(A1) |
申请公布日期 |
2010.03.11 |
申请号 |
US20090436374 |
申请日期 |
2009.05.06 |
申请人 |
MIYOSHI YUICHI;YAMAOKA TOHRU;NOTAKE HIDENORI;TAKEUCHI YUSUKE |
发明人 |
MIYOSHI YUICHI;YAMAOKA TOHRU;NOTAKE HIDENORI;TAKEUCHI YUSUKE |
分类号 |
H01L29/84;H01L21/30 |
主分类号 |
H01L29/84 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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