The present invention relates to microelectromechanical systems (MEMS). In particular, the present invention relates to MEMS arrays for use in acoustics and other applications.
申请公布号
WO2009154981(A3)
申请公布日期
2010.03.11
申请号
WO2009US45289
申请日期
2009.05.27
申请人
TUFTS UNIVERSITY;WHITE, ROBERT, D.;KRAUSE, JOSHUA, S.
