| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a positive photosensitive resin composition for spacer formation capable of easily forming highly flexible spacers of different heights simultaneously with bumps. <P>SOLUTION: A positive photosensitive resin composition with mass average molecular weight of 60,000 or more is used that contains an alkali soluble resin with mass average molecular weight of 60,000 or more containing a constitutional unit (a1) represented by the general formula (a-1) and a constitutional unit (a2) having a crosslinkable group, the proportion of the constitutional unit (a1) exceeding 40 mol%, and a quinone diazide group-containing compound. In the alkali soluble resin, the proportions of the constitutional unit (a1) and the constitutional unit (a2) are preferably 50-80 mol% and 20-50 mol% respectively. <P>COPYRIGHT: (C)2010,JPO&INPIT |
