LASER PROCESSING APPARATUS, METHOD FOR PRODUCING SOLAR CELL PANEL, SOLAR CELL PANEL AND LASER PROCESSING METHOD

摘要

PROBLEM TO BE SOLVED: To easily remove powder produced by scribing treatment of cutting a thin film.

SOLUTION: The laser processing apparatus comprises: a laser light source 11 irradiating a thin film formed at a substrate 2 with laser light and oscillating the laser light for cutting the thin film; and an UV lamp 15 irradiating the powder of the thin film scattered when the thin film is cut with ultraviolet light, so as to act the ultraviolet light on the powder. By irradiating the powder scattered from the thin film toward the upper direction with ultraviolet light when the thin film is cut by the laser light, the powder is modified, so as to be a stock having a material different from that of the thin film. The modification-finished powder dropped on the thin film is sucked away by an air duct 17, and can be easily removed from the thin film.

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