| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for determining a metal accurately by simple pretreatment and sample preparation by using a general analyzer such as an inductively coupled plasma mass spectrometer, in a resist cleaning agent such as ethylene carbonate including various resist-originated components after resist cleaning processing or reproduction processing. SOLUTION: The determination method of the metal in the resist cleaning agent including at least one kind of four to seven-membered saturated cyclic compounds which include a resist component, and has a carbonyl group, and may have an oxygen atom as a ring constituting atom, includes a dilution process for diluting the resist cleaning agent by acid aqueous solution, a solid phase extraction agent contact process for bringing a solution acquired in the dilution process into contact with a reverse phase type solid phase extraction agent and/or an activated carbon solid phase extraction agent, and a metal determination process for determining the metal in a solution after being brought into contact with the reverse phase type solid phase extraction agent and/or the activated carbon solid phase extraction agent acquired in the solid phase extraction agent contact process. COPYRIGHT: (C)2010,JPO&INPIT
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