| 摘要 |
In the manufacture of a semiconductor, in unnecessary semiconductor device formation areas 22b and 22c, a columnar electrode 14 made of copper is formed only in an area excluding an area corresponding to a dicing street 23 and both sides of the dicing street 23, and is not formed in the area corresponding to the dicing street 23 and both sides of the dicing street 23. As a result, the dicing blade is prevented from being clogged with copper. In this case, a plurality of layers of low-dielectric film and the same number of layers of wiring are formed on a semiconductor wafer such that they are alternately laminated, and the columnar electrode is formed on a connection pad portion of upper layer wiring formed on the low-dielectric film wiring laminated structure section with an insulating film therebetween. |
