SUBSTRATE HOLDING MEMBER, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD

摘要

A substrate holding member has: a ring-like tray (11) having a substrate supporting section (13) which supports an outer end section of a substrate (W), a mask supporting section (12) which is arranged on the outer circumferential side of the substrate supporting section (13) and protrudes higher than the upper surface of the substrate supporting section (13), and a recessed section (14) arranged between the substrate supporting section (13) and the mask supporting section (12); and a ring-like mask (21) which covers the recessed section (14) and the substrate supporting section (13) of the tray (11) in a state where the mask overlaps the mask supporting section (12) of the tray (11).