TERAHERTZ OSCILLATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a terahertz oscillation device allowing easy integration, which oscillates an electromagnetic wave of a frequency band with a wide bandwidth over the whole range of the oscillation frequency in a horizontal direction to a substrate with high efficiency and high power output.

SOLUTION: The terahertz oscillation device includes: a first electrode 2 placed on the semiconductor substrate 1; a second electrode 4 placed on the first electrode 2 via an insulating layer 3 and opposing the first electrode 2 on the semiconductor substrate 1; an MIM reflector 50 formed between the first electrode 2 and the second electrode 4 with the insulating layer 3 sandwiched therebetween; a resonator 60 adjoining the MIM reflector 50 and placed between the first electrode 2 and the second electrode 4 opposing each other on the semiconductor substrate 1; an active element 90 placed substantially at the center of the resonator 60; a waveguide 70 adjoining the resonator 60 and placed between the first electrode 2 and the second electrode 4 opposing each other on the semiconductor substrate 1; and a horn aperture 80 adjoining the waveguide 70 and placed between the first electrode 2 and the second electrode 4 opposing each other on the semiconductor substrate 1.

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