| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide semiconductor crystal fine particle thin film which attains exciton emission and has proper rectification characteristics, a method for depositing the same, and an electroluminescence element which contains the thin film. <P>SOLUTION: In the semiconductor crystal fine particle thin film made of zinc oxide which is obtained, by using a hexa-μ-acetato-μ4-oxo-tetrazinc powder as a raw material to deposit it on a substrate having a substrate temperature of 250°C or less by the reactive CVD method, a number-average particle size of the crystal fine particle is in the range of 0.3 to 20.0 nm, and a fixed amount of carboxylic acid is coordinated in zinc. <P>COPYRIGHT: (C)2010,JPO&INPIT |
