| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a technique for detecting displacement of coated resist, and to provide a technique capable of performing a precise inspection by correcting positions based on the detected displacement. <P>SOLUTION: A recognition mark detection section 7 and a reference position calculation section 8 receive output of a displacement sensor 2 and detect positions on a printed board coated with resist of two reference surfaces 1a having the same positions in terms of design and two enclosing frames 1c for surrounding the reference surfaces 1a on the printed board. A correction section 9 corrects a position at the side of measurement data or reference data according to a difference, namely a crossing angle (amount of rotation) of the difference between first and second segments, and a position difference (amount of shift) by position coordinates of the first segment for connecting the two reference surfaces and the second segment for connecting the two enclosing frames 1c. Measurement data or reference data at the corrected position are used for determination and hence for inspection. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
