| 摘要 |
PROBLEM TO BE SOLVED: To provide an excimer lamp capable of preventing breaking of a discharge container, caused by breaking of an edge part, in an excimer lamp equipped with the discharge container formed with a tube with a rectangular cross section. SOLUTION: In the excimer lamp 10 generating excimer discharge in a discharge space S of the discharge container 11, in a cross section cut in parallel with end faces 14a, 14b, long edge faces 12a, 12b of the discharge container 11 are formed in a curved shape wherein center parts 121a, 121b of the long-edge faces 12a, 12b are headed to the inner side of the discharge space S with respect to edge parts 16a, 16b, 16c, 16d connecting the long-edge faces 12a, 12b and short edge faces 13a, 13b, an ultraviolet-reflecting film 20 is formed on a surface exposed to the discharge space S of the discharge container 11, and the ultraviolet-reflecting film 20 is made thick in an edge part side than at a center part side. COPYRIGHT: (C)2010,JPO&INPIT |
