MEMS PROBE CARD AND METHOD OF MANUFACTURING SAME

摘要

The present invention relates to a MEMS probe card and a method of manufacturing same; the MEMS probe card comprises a substrate furnished with via holes whereinto a via hole filler conductor or resistor is charged, a resistance film that is formed on said via hole and substrate, an insulation film that is formed on said resistance film and substrate, and an electrode that is formed on the substrate so as to surround said resistance film and insulation film. By using the above-described MEMS probe card and method of manufacturing same, precise resistance values may be obtained, and responses may be made to power changes in test equipment, such as for semiconductor ICs.