| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for forming a film, with which malfunction of sticking of a surface of a first metal film and that of a second metal film to each other, and malfunction of occurrence of a wrinkle etc. are prevented without lowering production efficiency of a double-sided laminated substrate. Ž<P>SOLUTION: In the method for film forming of the double-sided laminated substrate, metal films are film formed on both faces of an organic resin film F roll-to-roll conveyed in an atmosphere of reduced pressure, wherein a first metal film is film formed on one surface of the organic resin film F via film forming means 13a, 13b using a dry-type plating method, an oxide film is formed on a surface of the first metal film via a dry-type surface treating means 11, and subsequently a second metal film is film formed on the other surface of the organic resin film F via the film forming means 13a, 13b using the dry-type plating method. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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