| 摘要 |
<P>PROBLEM TO BE SOLVED: To stably measure the pressure of a medium-to-high vacuum region by an ionization first measuring element and measure a peculiar measurement region by a second measuring element. Ž<P>SOLUTION: A hybrid vacuum gauge includes: a probe container 2; a first measuring section having an ionization structure, the first measuring section being provided in the probe container and including a component electrode including a filament 3, a grid 4, and an ion collector 8; and a second measuring section provided near an extension of the grid 4 and including a crystal oscillator 18 and a crystal oscillator container 19 structured to house the crystal oscillator 18; and a shield plate 13 that spatially separates the first measuring section from the second measuring section. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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