| 摘要 |
PROBLEM TO BE SOLVED: To accurately produce a thin film of the water-containing sample, and enable image observation with regard to a thin film sample observation system for a water-containing sample including a living sample, a cooling sample holder, and a thin film sample observation method. SOLUTION: The thin film sample observation system has an FIB device 1 for processing the water-containing sample represented as the biological sample at a thin film while the water-containing sample is cooled and freezed; and a sample observation device capable of attaining a TEM image or an STEM image of a cooled and freezed sample flake 20a conveyed by using the sample holder 10 while a cooled and freezed state of the sample flake is retained, when the sample flake 20a processed at a thin film state by the FIB device 1 is conveyed while the cooled and freezed state of the sample flake 20a is retained. COPYRIGHT: (C)2010,JPO&INPIT
|
