| 摘要 |
A phase change memory device and a corresponding method of manufacturing the same is presented. The phase change memory device includes a silicon substrate, a first insulation layer, cell switching elements, heaters, a gate, a second insulation layer, a barrier layer, a phase change layer and top electrodes. The first insulation layer is in the cell region of the substrate and has a first holes. The cell switching elements are formed in the first holes. The heaters are formed on the cell switching elements. The gate is in the peripheral region of the substrate and is higher than the cell switching elements. The second insulation layer having second holes which expose the heaters, and is defined to expose a hard mask layer of the gate. The barrier layer is on sidewalls of the second holes and on the second insulation layer. The phase change layer is formed in and over the second holes in which the barrier layer is formed. The top electrodes are formed on the phase change layer.
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