SEMICONDUCTOR MEMORY DEVICE WITH FLOATING BODY CELL AND METHOD FOR MANUFACTURING THE SAME

摘要

PURPOSE: A semiconductor memory device with a floating body cell and a method for manufacturing the same are provided to reduce a manufacturing cost and improve the efficiency of the device by increasing the charge storage space of a floating body. CONSTITUTION: A silicon substrate(21) with a first recess is prepared. An insulation layer(22) is formed on the silicon substrate and includes a second recess on a position which corresponds to the first recess. A semiconductor layer(23) is formed on the insulation layer and includes a third recess on a position which corresponds to the first recess. A gate(25) is formed on the third recess. The semiconductor layer includes source/drain regions(26A, 26B) and floating body(27) between the source/drain regions.