| 摘要 |
PROBLEM TO BE SOLVED: To suitably detect a substrate regardless of a curved state of the substrate. SOLUTION: Light in a light source 41 is made incident on the inside of a substrate 20 disposed in an arrangement part. When the light guided in the substrate 20 and emitted out of the substrate 20 is detected by a photodetector 42, it is detected that the substrate 20 is disposed in the arrangement part. When the light is not detected by the photodetector 42, it is detected that the substrate 20 is not disposed in the arrangement part. COPYRIGHT: (C)2010,JPO&INPIT |
