METHOD OF MANUFACTURING SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a substrate for reducing that a substrate falls from a base and sufficiently cleaning the substrate. SOLUTION: The method includes: a process of preparing a block 1 bonded to a base 2 and an alkaline solution 4; a process of slicing the block 1 bonded to the base 2 as a substrate series bonded to the base 2; a process of cleaning the substrate series by the alkaline solution 4; and a process of peeling the substrate series from the base 2 into a plurality of substrates 1a. The alkaline solution is controlled by a Brix value. COPYRIGHT: (C)2010,JPO&INPIT