发明名称 Shared masks for x-lines and shared masks for y-lines for fabrication of 3D memory arrays
摘要 A structure and a method of manufacturing a three dimensional memory using a number of bit line masks that is less than the number of device layers. A first bit line mask is used to form a first bit line layer in a first device level. The first bit line layer comprises first bit lines. The first bit line mask is also used to form a second bit line layer in a second device level. The second bit line layer comprises second bit lines. The first bit lines and the second bit lines have different electrical connections to a bit line connection level despite employing the same mask pattern.
申请公布号 US2010059796(A1) 申请公布日期 2010.03.11
申请号 US20080231000 申请日期 2008.09.09
申请人 SANDISK 3D LLC 发明人 SCHEUERLEIN ROY E.
分类号 H01L21/283;H01L27/06 主分类号 H01L21/283
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