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发明名称
DEVICE FOR COATING A PLURALITY OF CLOSEST-PACKED SUBSTRATES ARRANGED ON A SUSCEPTOR
摘要
申请公布号
EP2160759(A1)
申请公布日期
2010.03.10
申请号
EP20080759870
申请日期
2008.05.21
申请人
AIXTRON AG
发明人
BOYD, ADAM;SAYWELL, VICTOR;MULDER, JAN;FERON, OLIVIER;KAEPPELER, JOHANNES
分类号
H01L21/687;C23C16/458;C30B25/12
主分类号
H01L21/687
代理机构
代理人
主权项
地址
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