FLUID DEVICE UNIT STRUCTURE

摘要

A compact fluid device unit structure that is suitable for applications for allowing chemical liquid to be taken out of the structure as needed while chemical liquid circulation and water circulation are performed and in which fluid such as the chemical liquid is less likely to clot. The fluid device unit structure (FU) has fluid devices connected to each other via a fluid path and integrated and unitized on a base member (10). In the fluid device unit structure (FU) is formed a connection flow path (15) for connection between an air pressure operation valve (20A) and a manual operation valve (30A) that are adjacent to each other with a first chemical liquid outlet path for performing the chemical liquid circulation formed between the valves (20A, 30A). The connection flow path (15) is offset from the axis of the fluid devices.