METHOD OF FABRICATING CAPACITOR FOR CRACK PREVENTION

摘要

PURPOSE: A method for manufacturing a capacitor is provided to prevent a crack on a conductive layer and a mold layer by forming a trench on a region except a cell region. CONSTITUTION: A mold layer(25) is formed on the upper side of a substrate(21) with a cell region. An opening unit(26) is formed by etching the mold layer on the cell region. A trench(29) is formed by etching the mold layer on the region except the cell region. The opening unit and the trench are formed on a conductive layer. A charge storage electrode filled in the opening unit is formed by selectively removing the conductive layer.