PURPOSE: A probe substrate and a probe card thereof are provided to conveniently operate the cleaning work and prevent damage of the probe card by enabling a via contact part and an upper side wiring layer to be exposed to the outside and not to be closed by one side connector. CONSTITUTION: A probe substrate(1) transfers an electric signal inputted through a plurality of one side connector(2) to a probe(10). An upper side connection terminal(11) is arranged and formed in the upper side of substrate in two rows in order to be connected with the one side connector. A via contact part(13) is respectively located to the external direction to the two row arrangement of the upper side connection terminal and is vertically connected to an inter connection layer formed inside of the substrate. An upper side wiring layer(12a) electrically connects the upper side connection terminal and the via contact on the upper side of the substrate.
