发明名称 |
CONVEYOR ASSEMBLY AND METHOD FOR CONVEYING A SUBSTRATE. |
摘要 |
A conveyor assembly suitable for use in a substrate processing system includes: at least one substrate carrier having a substrate-carrying surface configured to support at least one substrate; a processing track; a return track; a drive system configured to drive the substrate carrier along the processing track and the return track; and at least one swivel unit configured to pivot the substrate carrier around a substantially horizontal axis from a first orientation into a second orientation, and/or vice versa. Also provided is a method for conveying a substrate carrier including: providing a substrate carrier; positioning the substrate carrier in a first orientation; conveying the substrate carrier along a first track; and rotating the substrate carrier around a substantially horizontal axis into a second orientation. |
申请公布号 |
NL2001910(C) |
申请公布日期 |
2010.03.10 |
申请号 |
NL20082001910 |
申请日期 |
2008.08.22 |
申请人 |
OTB SOLAR B.V., |
发明人 |
CLERKX, EDUARD RENIER FRANCISCA;DULLEMEIJER, ERNST;DINGS, FRANCISCUS CORNELIUS |
分类号 |
B65G49/06;C23C14/58;C23C16/56;H01L21/00;H01L21/677;H01L31/18 |
主分类号 |
B65G49/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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