发明名称 PROBE CARD
摘要 PURPOSE: A probe card is provided to prevent the surface of an object to be verified from damaging by reducing an impact which is generated when probe pins contact the object using a elastic support layer. CONSTITUTION: At least one groove(C) is formed on one side of a probe head(11). An elastic support layer(15) includes elastic materials. A probe pin(16) is electrically connected to a circuit line for verification. A first and a second electrode pads(17a, 17b) are respectively formed on each corresponding area of the probe head and the elastic support layer. A first circuit line(14a) and a second circuit line(14b) are connected to the first electrode pad and the second electrode pad.
申请公布号 KR20100026450(A) 申请公布日期 2010.03.10
申请号 KR20080085464 申请日期 2008.08.29
申请人 SAMSUNG ELECTRO-MECHANICS CO., LTD. 发明人 PARK, HO JOON;CHANG, BYEUNG GYU
分类号 H01L21/66;G01R1/073 主分类号 H01L21/66
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