发明名称 DEVICE FOR RECOVERING THE METAL MATERIAL AND METHOD FOR THE SAME
摘要 PURPOSE: An apparatus and a method for recovering a metal material are provided to improve the recovery rate of a metal material by recovering the metal material which is deposited on a shield. CONSTITUTION: A capture unit(10) captures a source gas including a metal precursor which is not reacted in a pre-set process. An extracting unit(20) extracts a metal material from the metal precursor. The extracting unit deposits the extracted metal material on a shield(30). The shield is melted in order to recover the metal material. A temperature inside the extracting unit is increased by heating units(40).
申请公布号 KR20100026503(A) 申请公布日期 2010.03.10
申请号 KR20080085530 申请日期 2008.08.29
申请人 HYNIX SEMICONDUCTOR INC. 发明人 KIL, DEOK SIN;LEE, KEE JEUNG;KIM, YOUNG DAE;KIM, JIN HYOCK;DO, KWAN WOO;PARK, KYUNG WOONG;LEE, JEONG YEOP
分类号 H01L21/02;H01L21/205 主分类号 H01L21/02
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