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发明名称
摘要
申请公布号
JP4428175(B2)
申请公布日期
2010.03.10
申请号
JP20040266619
申请日期
2004.09.14
申请人
发明人
分类号
H01L21/205;C23C16/46
主分类号
H01L21/205
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