| 摘要 |
Multilayer anti-reflective coatings having four or more layers are disclosed. In one aspect, the multilayer anti-reflective coating comprises a first layer having a refractive index n1, where n1<1.4, and an optical thickness of (0.25±5%) λo nm; a second layer adjacent to the first layer, the second layer having a refractive index n2, where n2≧1.8, and an optical thickness of (0.5±5%) λo nm; a third layer adjacent to the second layer, the third layer having a refractive index n3, where 1.4≦̸n3<1.6, and an optical thickness of (0.1±5%) λo nm; and a fourth layer adjacent to the third layer, the fourth layer having a refractive index n4, where n4≧1.8, and an optical thickness of (0.05±10%) λo nm; where λo is a wavelength in the visible light range.
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