| 摘要 |
PURPOSE: A boat is provided to load a substrate regardless of the size of the substrate and reduce manufacturing costs by installing a holder unit including a plurality of holders on the boat. CONSTITUTION: A holder unit(100) includes a plurality of holders(110) to load a substrate. A holder support part(300) which supports the holder unit is connected to a main body part(200). A protrusion part, which contacts to the holders, is formed on the upper side of the holder support part. A substrate lifting unit(400) includes a vertical body part(410) and a horizontal body part(420). Support pins(430), which support the substrate, are installed on the horizontal body part.
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