MANUFACTURING METHOD OF THIN FILM SOLAR CELLS

摘要

PURPOSE: A manufacturing method of a thin film solar cell is provided to prevent a short circuit and degradation of efficiency by controlling setting temperature of a substrate in order to prevent the overlap of each trench. CONSTITUTION: A transparent electrode layer(110) is formed on a substrate(100). A first trench(P1) is formed on a transparent electrode layer by a laser scribing process. A photoelectric transformation layer(120) is formed on the transparent electrode layer. A second trench(P2) is formed to be separated to a first trench with a predetermined interval on the photoelectric transformation layer by the laser scribing process. A back surface electrode layer(130) is formed on the photoelectric transformation layer. A third trench(P3) is formed to be separated to a second trench with a predetermined interval on the back surface electrode layer by the laser scribing process. A temperature of the substrate during the laser scribing process is adjusted in the range between -6°C and +6°C than the predetermined temperature set at the initial time of the laser scribing process.