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发明名称
Method for manufacturing capacitor in a semiconductor device
摘要
申请公布号
KR100946139(B1)
申请公布日期
2010.03.10
申请号
KR20030021062
申请日期
2003.04.03
申请人
发明人
分类号
H01L21/8242
主分类号
H01L21/8242
代理机构
代理人
主权项
地址
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