发明名称 MASK FOR THIN FILM DEPOSITION AND MANUFACTURING METHOD OF OLED USING THE SAME
摘要 PURPOSE: A mask for depositing a thin film and a method for manufacturing an OLED using the same are provided to prevent the masking failure of a thin film deposition process by reducing the deformation of a rib which is adjacent to the outermost slit of a fine mask. CONSTITUTION: A slit(13) is installed to penetrate through a base unit(11). The pre-set length of the slit expanded to a first direction. An outermost slit(14) is located in a second direction. The second direction is angled to the first direction. A rib(15) is arranged to be adjacent to the outermost slit. A rib support unit(17) is installed between the outermost slit and the rib. The rib support unit is integrated into the base unit.
申请公布号 KR20100026655(A) 申请公布日期 2010.03.10
申请号 KR20080085738 申请日期 2008.09.01
申请人 SAMSUNG MOBILE DISPLAY CO., LTD. 发明人 SUNG, DONG YOUNG;KIM, HONG RYUL
分类号 H01L21/027;C23C14/04;H01L21/20;H01L51/50;H05B33/10 主分类号 H01L21/027
代理机构 代理人
主权项
地址