发明名称 |
MASK FOR THIN FILM DEPOSITION AND MANUFACTURING METHOD OF OLED USING THE SAME |
摘要 |
PURPOSE: A mask for depositing a thin film and a method for manufacturing an OLED using the same are provided to prevent the masking failure of a thin film deposition process by reducing the deformation of a rib which is adjacent to the outermost slit of a fine mask. CONSTITUTION: A slit(13) is installed to penetrate through a base unit(11). The pre-set length of the slit expanded to a first direction. An outermost slit(14) is located in a second direction. The second direction is angled to the first direction. A rib(15) is arranged to be adjacent to the outermost slit. A rib support unit(17) is installed between the outermost slit and the rib. The rib support unit is integrated into the base unit. |
申请公布号 |
KR20100026655(A) |
申请公布日期 |
2010.03.10 |
申请号 |
KR20080085738 |
申请日期 |
2008.09.01 |
申请人 |
SAMSUNG MOBILE DISPLAY CO., LTD. |
发明人 |
SUNG, DONG YOUNG;KIM, HONG RYUL |
分类号 |
H01L21/027;C23C14/04;H01L21/20;H01L51/50;H05B33/10 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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