发明名称 MANUFACTURING METHOD OF SEIMICONDOCTOR ELEMENT
摘要 PURPOSE: A method for manufacturing a semiconductor device is provided to simplify the manufacturing process by removing a silicide formation process for reducing contact resistance between a gate electrode and a source/drain area. CONSTITUTION: A gate structure(40) is formed on a semiconductor substrate(10). A spacer(45) is formed on the sidewall of the gate structure. A source/drain area(50) is formed in the area which is adjacent to the gate structure and the space. A high-concentration impurity area(60) is selectively formed on the source/drain area. A high-concentration impurity area is formed by implanting N+ impurity.
申请公布号 KR20100026821(A) 申请公布日期 2010.03.10
申请号 KR20080085971 申请日期 2008.09.01
申请人 DONGBU HITEK CO., LTD. 发明人 LEE, JENG GWAN
分类号 H01L21/265;H01L21/336 主分类号 H01L21/265
代理机构 代理人
主权项
地址