TRANSFER SYSTEM AND TRANSFER METHOD USING ULTRASONIC VIBRATION
摘要
<p>PURPOSE: A transfer system and a transfer method using an ultrasonic vibration are provided to improve the efficiency of a transfer operation by depositing a transfer material to an ultrasonic vibrator in order to directly transfer the transfer material on a substrate. CONSTITUTION: An ultrasonic vibrator(110) generates an ultrasonic vibration. A glass(120) transfers the ultrasonic vibration from the ultrasonic vibrator. A plate(130) is formed on the lower side of the glass. Materials to be transferred are deposited on the plate. A substrate(140) is formed on the lower side of the plate. The ultrasonic vibration is transferred to a part of the glass. The materials are transferred to the substrate in order to form a pattern by the ultrasonic vibration.</p>
申请公布号
KR20100025627(A)
申请公布日期
2010.03.10
申请号
KR20080084241
申请日期
2008.08.28
申请人
KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY