ROLL-TO-ROLL TYPE THIN FILM PATTERN FORMATION APPARATUS

摘要

PURPOSE: A roll-to-roll-type apparatus for forming a thin film pattern is provided to simply replace a mask using unit-type masks instead of an integrated-type mask including a plurality of patterns. CONSTITUTION: An unwinding roll(12a) and an winding roll(12b) are installed in a vacuum chamber(11) and conveys a sheet(14). An elastomer layer is formed on the surface of a rotating drum(16). The sheet is conveyed around the surface of the rotating drum. A source containing part(20) contains a deposition source(M). A shutter(22) selectively blocks the supply of the deposition source from the source containing part toward the rotating drum. A mask(18) is closely adhered to the sheet on surface of the rotating drum while the deposition process of a thin film is performed.