发明名称 |
Acceleration sensor having single and multi-layer substrates |
摘要 |
An acceleration sensor in accordance with an aspect of the present invention comprises a first substrate, a multilayer second substrate and a sensor portion. The multilayer second substrate is opposed to the first substrate. The multilayer second substrate is provided with an electrode drawing opening. Further, the multilayer second substrate consists of a plurality of layers. The sensor portion (a movable mass body and a fixed electrode) is provided in a sealed cavity portion which is formed between the first substrate and the multilayer second substrate which are opposed to each other.
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申请公布号 |
US7673514(B2) |
申请公布日期 |
2010.03.09 |
申请号 |
US20070000626 |
申请日期 |
2007.12.14 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA |
发明人 |
FUKAURA TERUYA;KATSUKI SHINICHIRO;KATAHARA YUTAKA;SHIBATA SEISHI |
分类号 |
G01P15/125 |
主分类号 |
G01P15/125 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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