| 摘要 |
An operating method for a prober apparatus is disclosed which includes controlling the temperature of at least one part of the prober apparatus. Another operating method for a prober apparatus includes production and transfer of thermal energy between means for the exchange of heat and at least one component of the prober apparatus, wherein the production, the transfer or the production and the transfer of thermal energy is controlled. A prober apparatus includes at least one heat exchange element disposed in a spatial relation to at least one probe tool support so as to have an impact on the temperature thereof.
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