发明名称 |
System and method for optical interrogation of micro-mechanical sensors using microcavity interferometry |
摘要 |
A sensor and a method for sensing a change in mass of a reflective microbeam in a sensor, the sensor having a reflective layer disposed on a substrate and spaced apart from the reflective microbeam. The microbeam receives amplitude modulated laser energy at a first wavelength and is photothermally excited into resonance at the frequency of amplitude modulation, the reflective microbridge and the reflective layer receive optical energy at a second wavelength and reflect the optical energy toward a receiver. A change in reflectivity of the microbeam at different frequencies is determined. A change in reflectivity indicates a change in resonant frequency of the microbeam. Mass of the microbeam changes when a chemoselective material on the microbeam sorbs a target chemical.
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申请公布号 |
US7673517(B2) |
申请公布日期 |
2010.03.09 |
申请号 |
US20060559119 |
申请日期 |
2006.11.13 |
申请人 |
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE NAVY |
发明人 |
STIEVATER TODD H.;RABINOVICH WILLIAM S;HOUSER ERIC J;STEPNOWSKI STANLEY V.;MCGILL R ANDREW |
分类号 |
G01N29/00 |
主分类号 |
G01N29/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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