| 摘要 |
A semiconductor memory device, firstly, has both the thickness of a tunnel film and that of a top film provided thereon and configured to be in the FN tunneling region (4 nm or more). The data retention characteristics can be improved by configuring both the thickness of a tunnel film and that of a top film to have a thickness of in the FN tunneling region. Secondly, a high-concentration impurity region of a conductivity type the same as that of the substrate is provided in a substrate region arranged between assist gates provided adjacently to each other. The aforementioned high-concentration impurity region makes a depletion layer extremely thin when bias is applied to the assist gates. Hot holes generated between bands in the depletion region are injected into a charge storage region and the holes and electrons make pairs and disappear, enabling easy data erasing.
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