发明名称 |
Technique for shaping a ribbon-shaped ion beam |
摘要 |
A technique for shaping a ribbon-shaped ion beam is disclosed. In one particular exemplary embodiment, the technique may be realized as an apparatus for shaping a ribbon-shaped ion beam. The apparatus may comprise an electrostatic lens having a substantially rectangular aperture for a ribbon-shaped ion beam to pass through, wherein a plurality of focusing elements are positioned along short edges of the aperture, and wherein each focusing element is separately biased and oriented to shape the ribbon-shaped ion beam.
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申请公布号 |
US7675047(B2) |
申请公布日期 |
2010.03.09 |
申请号 |
US20060536992 |
申请日期 |
2006.09.29 |
申请人 |
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. |
发明人 |
RADOVANOV SVETLANA B.;KELLERMAN PETER L.;BENVENISTE VICTOR M.;LINDBERG ROBERT C.;PURSER KENNETH H.;ROCKWELL TYLER B.;BUFF JAMES S.;RENAU ANTHONY |
分类号 |
H01J37/10;H01J37/317 |
主分类号 |
H01J37/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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