发明名称 Plasma Fluorination Treatment of Porous Materials
摘要 <p>The application discloses articles and methods of plasma fluorination treatment that employ a capacitively-coupled system to fluorinate porous articles. The methods include placing the article to be treated within an ion sheath adjacent to an electrode and placing the article to be treated between powered and grounded electrodes separated by about 25 mm or less.</p>
申请公布号 KR100946817(B1) 申请公布日期 2010.03.09
申请号 KR20087028717 申请日期 2002.11.21
申请人 发明人
分类号 C08J7/04;C08J9/36;B32B9/00;C08F8/20;H01L21/311 主分类号 C08J7/04
代理机构 代理人
主权项
地址