发明名称 Thin film-capacitor-embedded printed circuit board and method of manufacturing the same
摘要 Disclosed herein is a printed circuit board with an embedded thin-film capacitor, and a method of manufacturing the same. Specifically, the present invention relates to a printed circuit board with an embedded thin-film capacitor, comprising a lower electrode formed on an insulating substrate; an amorphous paraelectric film formed on the lower electrode; a metal seed layer formed on the paraelectric film; and an upper electrode formed on the metal seed layer and having a surface roughness (Ra) of more than 300 nm; and a method of manufacturing a printed circuit board with an embedded thin-film capacitor, comprising forming a lower electrode on an insulating substrate; forming an amorphous paraelectric film on the lower electrode, using a low-temperature film formation process; forming a metal seed layer on the paraelectric film; and forming an upper electrode having a surface roughness (Ra) of more than 300 nm on the metal seed layer, using an electroplating method.
申请公布号 US7675756(B2) 申请公布日期 2010.03.09
申请号 US20060593088 申请日期 2006.11.06
申请人 SAMSUNG ELECTRO-MECHANICS CO., LTD. 发明人 MOON JIN SEOK;CHUNG YUL KYO;LYOO SOO HYUN;SOHN SEUNG HYUN
分类号 H05K1/16 主分类号 H05K1/16
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