发明名称 |
Inspection device for humidity sensor and method for adjusting sensor characteristics of humidity sensor |
摘要 |
An inspection device inspects a humidity sensor having a sensor portion and a circuit portion, which are integrated into one chip. The inspection device includes: an inspection chamber for accommodating a wafer, in which a plurality of humidity sensors are disposed as a sensor chip in a wafer state; a probe for contacting an electrode pad of the circuit portion; a tester electrically connected to the probe for inspecting electric properties of the humidity sensor; and a temperature-humidity control portion for controlling a temperature and a humidity in the inspection chamber.
|
申请公布号 |
US7673493(B2) |
申请公布日期 |
2010.03.09 |
申请号 |
US20070727994 |
申请日期 |
2007.03.29 |
申请人 |
DENSO CORPORATION;NIPPON SOKEN, INC. |
发明人 |
ITAKURA TOSHIKAZU;ISOGAI TOSHIKI |
分类号 |
G01N21/00;G01M99/00 |
主分类号 |
G01N21/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|