METHOD OF FABRICATING NANOWIRES

摘要

PURPOSE: A method of fabricating a nanowire with plural compositions is provided to contact between plural elements with one wire in the inside of an integrated circuit, and to perform multiple functions with one wire. CONSTITUTION: A method of fabricating a nanowire comprises the following steps: supplying plural resins(32,34,36) into a micro fluidic channel; exposing plural resins to a light while flowing through the micro fluidic channel; and manufacturing the nanowire polymerized from resins with two-photon absorption(TPA). The plural resins have different compositions. The different compositions comprise p-type silicon and N type silicon. The step of supplying plural resins comprises a step of supplying a urethane acrylic acid monomer or a urethane acrylate acid oligomer with a photo-initiator into the micro fluidic channel.