发明名称 Method for producing a transistor component having a field plate
摘要 A method for producing a transistor component having a field plate. One embodiment includes providing a semiconductor body having a first side, and including a first trench extending into the semiconductor body. A field plate dielectric layer is produced on the first side and at uncovered areas of the first trench such that a residual trench remains. A field plate layer is produced in the residual trench. The first side of the semiconductor body is uncovered using a polishing method. The field plate dielectric layer is partially removed from the at least one first trench proceeding from the first side.
申请公布号 US7674678(B2) 申请公布日期 2010.03.09
申请号 US20080115168 申请日期 2008.05.05
申请人 INFINEON TECHNOLOGIES AUSTRIA AG 发明人 HILLER ULI;BLANK OLIVER
分类号 H01L21/336 主分类号 H01L21/336
代理机构 代理人
主权项
地址