发明名称 Mold and molding apparatus using the same
摘要 A molding apparatus for patterning a workpiece includes a mold having a pattern to be transferred to the workpiece, with the pattern including recesses, a first support member for supporting the mold, and a second support member, arranged opposite to the first support member, for supporting the workpiece. A pressing mechanism brings the first and second support members close to each other and presses the mold and the workpiece together so as to transfer, to the workpiece, the pattern on the mold. Recessed portions are provided on at least one of a surface of the mold on the first support member side, a region of the first support member, and a region of the second support member. The recessed portions correspond to recesses in the pattern of the mold.
申请公布号 US7674104(B2) 申请公布日期 2010.03.09
申请号 US20080024338 申请日期 2008.02.01
申请人 CANON KABUSHIKI KAISHA 发明人 SEKI JUNICHI;DEN TOHRU
分类号 B29C43/04;B81C99/00;B29C35/00;B29C59/02;G03F7/00;H01L21/027 主分类号 B29C43/04
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