A UNIT AND A METHOD FOR TRANSFERING A WAFER

摘要

PURPOSE: A substrate transfer unit and a method for transferring the substrate are provided to improve the efficiency of a substrate transfer by connecting a substrate transfer robot and a buffer unit. CONSTITUTION: A front open unified pod(FOUP)(400) is composed of a plurality of slots in which substrate is contained. A buffer unit(240) is composed of a plurality of slots in which the substrate is on standby. The buffer unit includes an entrance and an exit for the substrate. An index robot(300) loads/unloads the substrate between the FOUP and the buffer unit. A substrate transfer robot(220) transfers the substrate from the buffer unit to a processing chamber(100). The substrate transfer robot and the buffer unit moves together by a connection.