STABILIZATION DEVICE FOR 2ND HARMONIC PULSE IN PULSED LASER SYSTEM

摘要

PURPOSE: A stabilization device for 2nd harmonic pulse in a pulsed laser system is provided to get a stable second harmonic laser pulse by selectively positioning an optical absorption filter on a laser path. CONSTITUTION: A pulse laser oscillator(110) outputs A laser pulse. A nonlinear crystal(120) changes a laser pulse of a first wave length which is outputted in the pulse laser oscillator into a second harmonic wave having a half value of the first wave length. An optical absorption filter(130) outputs the second harmonic having the low energy by absorbing part of the energy of the second harmonic laser pulse. A liner movement unit selectively inserts the optical absorption filter on the laser path. A liner movement controller controls the liner movement of the liner movement unit.